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All Categories > Accessories > Flatness Instruments > Topos Interferometer > Item # TOPOS 100  


Item # TOPOS 100, Topos Interferometer

TOPOS Interferometers are available as models with either 50 mm or 100 mm measurement area. For the exclusive measurement of small parts, a special TOPOS 50 - 20 with 20 mm measuring area is manufactured. The TOPOS 100 model offers an optional zoom lens for an even larger operational range. Large rings, of 250mm diameter for example, can be measured automatically with a TOPOS 100 featuring a supplementary rotating measurement table. This offers the advantage of high spatial resolution measurements of the individual ring segments and furthermore, represents an economically attractive alternative to a measurement device with a measurement area of the actual size of the maximum ring diameter.



 Specifications 

Diameter Φ
100 mm

Flatness of Reference Surface
Better than 0.06 micron

Material of Reference Surface
Quartz Glass

Accuracy
(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity

Dynamic Range
up to 100µm, Limited By the Slope of the Surface

Repeatability of Peak to Valley
Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)

Resolution
Better than 0.01 micron

No. of Data Points
300000

Data Acquisition Time (CA)
1.2 sec.

Analysis Time
1 sec.

Interferometer Unit Dimensions
680 x 440 x 880 mm

Interferometer Mount Dimensions
750 x 750 x 60 mm

Interferometer Unit Weight
83 kg

Interferometer Mount Weight
50 kg

Lateral Resolution
0.2 mm (up to 0.05 mm at 25 mm Measuring Area with Optional Zoom Lens)

Calibrated Sensitivity per Fringe
0.5 micron
1 micron
2 micron
4 micron



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