Diameter Φ
|
|
50 mm
|
|
Flatness of Reference Surface
|
|
Better than 0.06 micron
|
|
Material of Reference Surface
|
|
Quartz Glass
|
|
Accuracy
|
|
(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity
|
|
Dynamic Range
|
|
up to 100µm, Limited By the Slope of the Surface
|
|
Repeatability of Peak to Valley
|
|
Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)
|
|
Resolution
|
|
Better than 0.01 micron
|
|
No. of Data Points
|
|
300000
|
|
Lateral Resolution
|
|
0.1 mm
|
|
Data Acquisition Time (CA)
|
|
1.2 sec.
|
|
Analysis Time
|
|
1 - 3 sec. (Depending on the Number of Data Points)
|
|
Interferometer Unit Dimensions
|
|
560 x 300 x 400 mm
|
|
Interferometer Mount Dimensions
|
|
615 x 490 x 600 mm
|
|
Interferometer Unit Weight
|
|
34 kg
|
|
Interferometer Mount Weight
|
|
32 kg
|
|
Calibrated Sensitivity per Fringe
|
|
0.5 micron 1 micron 2 micron 4 micron
|
|