Lapmaster International
Toll Free: (877) FLATNESS • P (224) 659-7101 • F (224) 659-7103
E-Mail: Sales@Lapmaster.com • Website: www.Lapmaster.com
All Categories > Accessories > Flatness Instruments > Topos Interferometer > Item # TOPOS 50  


Item # TOPOS 50, Topos Interferometer


TOPOS Interferometers are available as models with either 50 mm or 100 mm measurement area. For the exclusive measurement of small parts, a special TOPOS 50 - 20 with 20 mm measuring area is manufactured. The TOPOS 100 model offers an optional zoom lens for an even larger operational range. Large rings, of 250mm diameter for example, can be measured automatically with a TOPOS 100 featuring a supplementar y rotating measurement table. This offers the advantage of high spatial resolution measurements of the individual ring segments and furthermore, represents an economically attractive alternative to a measurement device with a measurement area of the actual size of the maximum ring diameter.



 Specifications 

Diameter Φ

50 mm

Flatness of Reference Surface

Better than 0.06 micron

Material of Reference Surface

Quartz Glass

Accuracy

(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity

Dynamic Range

up to 100µm, Limited By the Slope of the Surface

Repeatability of Peak to Valley

Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)

Resolution

Better than 0.01 micron

No. of Data Points

300000

Lateral Resolution

0.1 mm

Data Acquisition Time (CA)

1.2 sec.

Analysis Time

1 - 3 sec. (Depending on the Number of Data Points)

Interferometer Unit Dimensions

560 x 300 x 400 mm

Interferometer Mount Dimensions

615 x 490 x 600 mm

Interferometer Unit Weight

34 kg

Interferometer Mount Weight

32 kg

Calibrated Sensitivity per Fringe

0.5 micron
1
micron
2
micron
4
micron



Print Back