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Item # TOPOS 100
Item # TOPOS 100, Topos Interferometer
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TOPOS Interferometers are available as models with either 50 mm or 100 mm measurement area. For the exclusive measurement of small parts, a special TOPOS 50 - 20 with 20 mm measuring area is manufactured. The TOPOS 100 model offers an optional zoom lens for an even larger operational range. Large rings, of 250mm diameter for example, can be measured automatically with a TOPOS 100 featuring a supplementary rotating measurement table. This offers the advantage of high spatial resolution measurements of the individual ring segments and furthermore, represents an economically attractive alternative to a measurement device with a measurement area of the actual size of the maximum ring diameter.
Specifications
Diameter Φ
100
mm
Flatness of Reference Surface
Better than 0.06
micron
Material of Reference Surface
Quartz Glass
Accuracy
(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity
Dynamic Range
up to 100µm, Limited By the Slope of the Surface
Repeatability of Peak to Valley
Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)
Resolution
Better than 0.01
micron
No. of Data Points
300000
Data Acquisition Time (CA)
1.2
sec.
Analysis Time
1 sec.
Interferometer Unit Dimensions
680 x 440 x 880
mm
Interferometer Mount Dimensions
750 x 750 x 60
mm
Interferometer Unit Weight
83
kg
Interferometer Mount Weight
50
kg
Lateral Resolution
0.2 mm (up to 0.05 mm at 25 mm Measuring Area with Optional Zoom Lens)
Calibrated Sensitivity per Fringe
0.5
micron
1
micron
2
micron
4
micron
MORE IMAGES
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Measurement Pattern
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Measurement Principle
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Cross Sectional View
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Cross Sectional Graph
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False-Color Image
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3D Graphics