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All Categories > Accessories > Flatness Instruments > Topos Interferometer > Item # TOPOS 100  
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Item # TOPOS 100, Topos Interferometer


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TOPOS Interferometers are available as models with either 50 mm or 100 mm measurement area. For the exclusive measurement of small parts, a special TOPOS 50 - 20 with 20 mm measuring area is manufactured. The TOPOS 100 model offers an optional zoom lens for an even larger operational range. Large rings, of 250mm diameter for example, can be measured automatically with a TOPOS 100 featuring a supplementary rotating measurement table. This offers the advantage of high spatial resolution measurements of the individual ring segments and furthermore, represents an economically attractive alternative to a measurement device with a measurement area of the actual size of the maximum ring diameter.




 Specifications   

Diameter Φ

100 mm

Flatness of Reference Surface

Better than 0.06 micron

Material of Reference Surface

Quartz Glass

Accuracy

(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity

Dynamic Range

up to 100µm, Limited By the Slope of the Surface

Repeatability of Peak to Valley

Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)

Resolution

Better than 0.01 micron

No. of Data Points

300000

Data Acquisition Time (CA)

1.2 sec.

Analysis Time

1 sec.

Interferometer Unit Dimensions

680 x 440 x 880 mm

Interferometer Mount Dimensions

750 x 750 x 60 mm

Interferometer Unit Weight

83 kg

Interferometer Mount Weight

50 kg

Lateral Resolution

0.2 mm (up to 0.05 mm at 25 mm Measuring Area with Optional Zoom Lens)

Calibrated Sensitivity per Fringe

0.5 micron
1
micron
2
micron
4
micron


 MORE IMAGES 

·  Measurement Pattern

·  Measurement Principle

·  Cross Sectional View

·  Cross Sectional Graph

·  False-Color Image

·  3D Graphics


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