Item # TOPOS 50, Topos Interferometer On Lapmaster Wolters

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	Item # TOPOS 50, Topos Interferometer

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TOPOS Interferometers are available as models with either 50 mm or 100 mm measurement area. For the exclusive measurement of small parts, a special TOPOS 50 - 20 with 20 mm measuring area is manufactured. The TOPOS 100 model offers an optional zoom lens for an even larger operational range. Large rings, of 250mm diameter for example, can be measured automatically with a TOPOS 100 featuring a supplementar y rotating measurement table. This offers the advantage of high spatial resolution measurements of the individual ring segments and furthermore, represents an economically attractive alternative to a measurement device with a measurement area of the actual size of the maximum ring diameter.

Specifications

Diameter Φ		50 mm

Flatness of Reference Surface		Better than 0.06 micron

Material of Reference Surface		Quartz Glass

Accuracy		(0.1 - 0.4) µm + 2% of Measured Value, Depending on the Sensitivity

Dynamic Range		up to 100µm, Limited By the Slope of the Surface

Repeatability of Peak to Valley		Better than 0.01µm (RMS of 50 Measurements of a reference surface measured at 1.0 um/fringe)

Resolution		Better than 0.01 micron

No. of Data Points		300000

Lateral Resolution		0.1 mm

Data Acquisition Time (CA)		1.2 sec.

Analysis Time		1 - 3 sec. (Depending on the Number of Data Points)

Interferometer Unit Dimensions		560 x 300 x 400 mm

Interferometer Mount Dimensions		615 x 490 x 600 mm

Interferometer Unit Weight		34 kg

Interferometer Mount Weight		32 kg

Calibrated Sensitivity per Fringe		0.5 micron 1 micron 2 micron 4 micron

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	· Measurement Pattern

	· Measurement Principle

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Item # TOPOS 50, Topos Interferometer

Diameter Φ

Flatness of Reference Surface

Material of Reference Surface

Accuracy

Dynamic Range

Repeatability of Peak to Valley

Resolution

No. of Data Points

Lateral Resolution

Data Acquisition Time (CA)

Analysis Time

Interferometer Unit Dimensions

Interferometer Mount Dimensions

Interferometer Unit Weight

Interferometer Mount Weight

Calibrated Sensitivity per Fringe